The Nanotechnology Core Facility (NCF) at the University of Illinois at Chicago is a versatile MEMS/Nano facility and is accessible to both non-profit academic and industrial researchers. With over 4000 sq. ft. of clean room and laboratory space in the Engineering Research Facility (ERF) building, the NCF is one of the largest in the Chicago-metro area.

Nanotechnology Core Facility enables research by providing access, training, service and process guidance on fabrication and characterization equipment. As a research and development laboratory, NCF is dedicated to application of integrated circuit and fiber optic technology to improve manufacturing methods for MEMS/Nano devices, BioMEMS, Microfluidic, Electromechanical, Mechanical, Chemical, Optical, Photonic and multi-functional devices, some of which have previously been built by more traditional techniques.


Nanotechnology Core Facility; Room 3064, Engineering Research Facility; 842 W. Taylor St. Chicago, IL 60607-7022



Staff Members